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Metrology
field of measurement.
See Also: Measurement, Instrumentation, Coordinate Measuring Machines
- Valhalla Scientific Inc.
product
100-Amp Current Calibrator And AC/DC Transconductance Amplifier
2555A
World’s Leading Precision 100-Amp AC/DC Current Standard - For 30 years Valhalla Scientific’s design has proven rock-solid reliability in metrology labs worldwide. The 2555A is a calibration powerhouse with wide-ranging applications and unsurpassed quality.
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Dimensional Metrology
Integrated Metrology Family
Nova Measuring Instruments Inc.
Nova is the market leader in the space of integrated metrology platforms with multiple generations of products. Our integrated metrology platforms enable advanced process control (APC) to monitor and control wafer to wafer variations of complex high-end CMP and Etch applications with high productivity and reliability required for the most advanced logic and memory technology nodes.
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Advanced Metrology System
NGS 3500L
This top performance system is designed for applications where high-speed defect detection and precision measurements on wafers and other parts are required. It is well suited for use as a dedicated production tool or as a versatile processdevelopment system. It features a powerful set of automated as well as semi-automatic optical/ video tools optimized for high accuracy, production throughput, and ease of use.
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Virtual Interface Technology for 3D-IC Metrology
VIT
TSV profile (depth, top & bottom CD, tilt, SWA)-Residue Detection-RST-Copper Nail Height-Bump Height and Cu pillar height-Edge trim profile
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Measurement Systems
MicroMeasure3D
Sciences et Techniques Industrielles de la Lumière
STIL MicroMeasure3D, PORTICO3D and MAESTRO3D are measurement systems designed to achieve true 3D metrology of each point for the most demanding applications adapted to Industry 4.0 standards.
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Scatterometers/ Thin Film Metrology Systems
LittleFoot Series
The n&k LittleFoot-CD, and LittleFoot-CD450 are DUV-Vis-NIR scatterometers/thin film metrology systems, based on polarized reflectance measurements (Rs and Rp) from 190nm to 1000nm, with microspot technology. The systems in the LittleFoot-CD Series determine thickness, n and k spectra from 190nm-1000nm of thin films, as well as depths, CDs, and profiles of trenches and contact holes.
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3D Scanning Software
Software is a comprehensive component to any advanced metrology system. Combined with laptops and portable equipment, 3D scanning and measurement is now possible virtually anywhere. 3D scanner software plays a critical role in every stage from the creation of a concept design to the manufacturing and inspection of prototypes. Below is a look at some of the Laser Scanner Software and 3D Scanner Software providers and platforms we represent and handle.
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Metrology System
Echo
The Echo system is a comprehensive in-line metal film metrology tool for single and multi-layer metal film measurements in leading-edge logic, memory, advanced packaging, and specialty semiconductor devices.
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Software
QFP markets Inspection, Reverse Engineering and Dimensional Analysis software. From PolyWorks Inspector software for industrial metrology, to PolyWorks Reviewer™, a free solution for design review.
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Benchtop Metrology Solution
FilmTek 2000 PAR-SE
Scientific Computing International
Our most advanced benchtop metrology solution, engineered to meet the needs of nearly any advanced thin film measurement application, from R&D to production. Combines spectroscopic ellipsometry and DUV multi-angle polarized reflectometry with a wide spectral range to deliver the highest accuracy, precision, and versatility in the industry. Patented parabolic mirror technology allows for a small spot size down to 50µm, ideal for direct measurement of product wafers and patterned films.
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Platform
AXM XM8000 Wafer
The complete solution for operator free, automated X-ray wafer metrology. XM8000 is specifically designed for inline use in clean room environments.
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Hydrogen Frequency & Time Standard
CH1-1007
Hydrogen frequency and time standard Ch1-1007 is designed to generate and reproduce precision, highly stable, spectrally pure frequency and time signals. Main areas of application: – in metrology when transferring the sizes of units of frequency and time, including as part of mobile measuring complexes; – in radio astronomy when conducting scientific research; - in radio navigation when working as part of automated measuring systems and complexes.
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Microelectronics And Packaging AOI
Machine Vision Products, Inc. has extensive experience in a wide range of Microelectronics and Packaging applications. MVP works with the world’s leading manufacturers on a global basis. From multiple die and wire technologies to leadframe, ball grid array and surface inspection applications, MVP has the widest applications toolbox of any AOI provider. MVP takes pride in the fact that they supply many complex inspection solutions to diverse industries such as Automotive, Telecoms, Medical Devices, Military, and Space. MVP’s 900 Series is the base platform upon which all Microelectronics and Packaging inspection solutions are based. The 900 series 2D capabilities provide metrology and defect detection using a propriety Quad-Color lighting, Telecentric optics and resolutions down to 1um. 3D height measurement capabilities allow for in-line high speed inspection of Dies, paste deposition, positional accuracy, volume and height with a resolution down to 1.13um.
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Add-ons For Metrology
We offer add-on products for Optical Frequency Combs and metrology applications. These include heterodyne photodetectors (BDU), and highly stable RF oscillators, just to name a few.
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Ultrastable Microwaves
Ultra-stable microwave sources are paramount for a broad range of applications, including precision metrology, deep space navigation, telecom and next generation wireless communication, as well as coherent radar. With the PMWG-1500 Menlo Systems offers a unique commercial solution for providing ultrastable microwaves in an all-in-one solution.
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Smart Factory Inspection System
API, recognizing manufacturing industry’s increasing demand for part measurement automation, with a higher degree of accuracy, has developed its Smart Factory Inspection System with true 6 Degrees of Freedom (6DoF) real-time 3D robotic measurement incorporating its proven metrology technology and calibration components.SFIS can be delivered as a customized integrated solution or as a standard production inspection cell.
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Optical Filter Sets
Our filter sets support a great range of fluorophores for microscopes and imaging systems. Patented design techniques drive some of the most spectrally sophisticated optical filters on the market. High transmission, steep edges, precise spectral edge placement, and optimized blocking combine for more reliable measurements. A wide selection of individual bandpass filters and dichroic beam-splitters support unique applications, and world-class manufacturing and cutting-edge metrology ensure consistent performance that always meets specifications.
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Metrology System
Aspect
Memory density increases with both layer-pair scaling and tier stacking for memory stacks well over 200 pairs. The Aspect metrology system was designed with these future architectures and scaling strategies in mind. Aspect metrology is demonstrating performance superior to X-ray systems across multiple customer devices through a revolutionary infrared optical system providing full profiling capability to enable critical etch and deposition control, with the speed and process coverage that customers require.
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Coupler Metrology
Rosenberger Hochfrequenztechnik GmbH & Co. KG
Rosenberger provides directional coupler-based measurement techniques as well as probes for comprehensive cross-domain coupling analysis.Nowadays, the introduction of new accessories within vehicles, like rear seat infotainment, smart dashboards, and various advanced driver assistance systems, has increased the demand for high-speed automotive bus systems working in parallel with the high-voltage power networks in electric cars.
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Compact Horizontal Gage
1302
The Adcole Model 1302 represents a significant advance in precision metrology, and is an essential part of the production process for sliding cam and shifting camshaft components. The camshaft gage features two opposing measuring heads to maximize speed and achieve faster cycle time, while still delivering the sub-micron accuracy and repeatability that have defined Adcole gages as the world standard in cam/crank metrology.
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Metrology CT Scanner
The GOM CT scans complex components in one measuring sequence and thus makes the entire part including internal structures available with component positioning performed automatically. GOM CT technical specifications: 225-kV x-ray source | 3k detector | Measuring Volume: 240 mm x 400 mm | Photogrammetric Calibration | Temperature balancing | 5-axis kinematics.
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Gauges & Calibrators
Ralston Instruments' gauges and calibrators are born from decades of experience working with technicians, project managers and facilities teams responsible for maintaining metrology instruments.
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Full Range Photodiode Array UV-VIS-NIR-SWIRLaboratory Spectroradiometers
The SR-Series of full range laboratory spectroradiometers is ideal for a wide range of applications, including:*Solar radiance and irradiance measurements*Solar simulator test and classification*LED, laser, light source metrology*Radiometric calibration transfer*Remote sensing applications
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Automated Metrology System
EVG®50
High-throughput, high-resolution metrology for bonded stacks and single wafers. The EVG 50 (fully automated stand-alone tool) and the Inline Metrology Module (integrated in EVG''s high-volume manufacturing systems) offer highly accurate measurements at high speed, utilizing different measurement methods for a large number of applications. The tool''s application range covers multi-layer thickness measurements for determination of the total thickness variation (TTV) of an intermediate layer, the inspection of bond interfaces as well as resist thickness measurement, and meets the most demanding requirements of the yield-driven semiconductor industry.
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Slip Line Detection System
YIS 200
The YIS and SF Series metrology systems are designed for optical detection of wafer defects such as crystaldislocations, slip and other defects. The YIS-300HM (for 300 mm wafers) and YIS-200HM (for 200 mm wafers) utilizeMakyoh optics technology (Magic Mirror) and integrated robotic wafer handler provided by Hologenix.
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Surface Imaging & Metrology Software
Mountains®
Analyze multiple types of surface data. Turn your surface data into accurate, visual surface analysis reports. See every feature with high quality real-time 3D imaging of surface topography. Characterize surfaces in accordance with the latest metrology standards.
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Optical Metrology
The thorough investigation of interferometers, spectrometers and the imaging quality and resolution limit of microscopes with conventional or structured illumination is enabled by fast physical optics.
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ATOS ScanBox
Series 6
In production metrology, it is important to check a large number of parts as completely as possible, in order to be able to correct faulty production processes at short notice and in a targeted manner. Typical applications for the ATOS ScanBox 6130 are quality control e.g. of attached parts or interior parts, but also product development and tool tryout. Very large or heavy parts can also be measured in the ATOS ScanBox 6130, for example cast parts or tools.
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Programming
You are looking for a LabVIEW-solution for a test problem? LabVIEW is an excellent development environment for all areas of metrology. Here we have extensive experience and can help in your test problems. In the LabVIEW programming language, we develop VIs (Virtual Instruments) that can be integrated easily in TestStand. Using hardware-oriented programming languages such as C# and LabVIEW, we develop integrations of control and measurement components.
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Automated Checking Fixture
AutoGauge-ACF
Perceptron has combined over 35 years of metrology and manufacturing experience to create a truly absolute, correlation-free checking fixture for your plant floor. Virtually everything about AutoGauge-ACF is automatic – from robot path generation that enables quick setup and changes to the display of measurement results for real-time analysis.
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Deep Ultraviolet Spectrophotometer System
VUVAS-10X
A new ultraviolet spectrophotometer system for optical metrology just arrived at NASA Goddard! The VUVAS-10X spectrophotometer works best in the 90 to 160 nanometer wavelength range, also known as deep or vacuum ultraviolet (VUV) region. It uses a windowless hydrogen plasma light source and differential pump section to reach many wavelengths beyond those of conventional deuterium lamps. The source also works with other gases, or gas mixtures, for atomic spectral line emission from about 30 nanometers (double ionized Helium gas) up to the Visible light range. The new spectrophotometer system, McPherson VUVAS-10X, uses a one-meter focal length high-resolution monochromator with the special light source, scintillated detector and Model 121 goniometric sample chamber. The system is ideal for optical transmission, absorbance and specular reflectance at incident angles up to 60 degrees. This McPherson spectrophotometer system will help develop, inspect and qualify optical materials and coatings used for very high altitude and extraterrestrial space flight missions.
