Genmark Automation
Genmark Automation, Inc., designs, develops and manufactures high-precision robotics, motion control and integrated tool automation solutions for the global semiconductor, data storage and flat panel display industries, and is a leading OEM supplier of atmospheric and vacuum transfer robots and peripheral equipment.
- (510) 897-3400
- (510) 897-3401
- Order_Management@GenmarkAutomation.com
- Mktg-Sales@GenmarkAutomation.com
- 46723 Lakeview Blvd
Fremont, CA 94538
United States
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Dual-Arm Robot for Transport Applications of 300mm and 450mm Wafers
GPR-GB8-SM
The combination of global linear motion of the two-links arm (R-axis) and rotation (Y-axis) of two swapping arms (A1 and A2 axes) ensure optimal handling of up to 4 in-line FOUPs, and dimensionally equivalent process modules, without the need to mount the robot on linear track component.
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Genmark Integration Framework and Technology Development Kit
GIFT Server
The Genmark Integration Framework and Technology (GIFT) development kit is a set of software components, tools and techniques used for rapid development of equipment automation applications. It offers off-the-shelf factory host-computer interface, which are compliant with all related SEMI standards. The product features advanced user interface, broad range of supported automation hardware and presets for many 300mm semiconductor factories.
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Motion Control Components
- Control of versatile robotic structures, including "yaw", "pitch" and "roll" motion capabilities- S-curve velocity profiling, based on polynomial splines and Bernstein-Bezier curves- Continuous path control in multi-segment smooth trajectories- Synchronization of multiple axes- Trajectory control with user defined velocity profiles- Kinematical modeling of open and closed loop mechanisms- Singularity consistent path planning and singularity avoidance- Optimal PID filter tuning- Automatic adjustment with respect to the surrounding equipment (cassettes, process stations, etc.)- Tilting capabilities in terms of the end-effector frame- Compensation for deflection of the end effector, the manipulated object and geometric in accuracies of the arm Scanning and Aligning Features- Wafer mapping based on through-beam or reflective sensors- Automatic detection of the planarity and the center of wafers and FPD- Non contact FPD aligning. Misalignment compensation on the fly Safety- Programmable travel limits- Position tracking error detection- Amplifier overload protection- Emergency stop
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Software for Programming, Diagnostic, Maintenance and Calibration of Genmark Automation Products
GB Tool Box™
The GB Tool Box™ is a new generation of powerful utilities intended to simplify the programming, diagnostic, maintenance and calibration of Genmark Automation products. Its intuitive user interface requires no training or previous experience. Designed as an extendable platform it can cover wide range of automation applications. The open extension interface is a technology for third parties to add new functionalities to GB Tool Box 2.0.
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Ultra-Precise Robot for Transporting 300/450mm Wafers and Large FPDs
GPR-GB8
Designed for ultra-precise transport of 300/450mm wafers and large FPDs, the GPR-GB8 Robot System combines increased reach and load capacity while employing Genmark’s breakthrough patented GPR™ technology.The patented GPR™ technology enables the servo-controlled robot to interface compliantly and intelligently with misaligned cassettes, FOUPS and process modules, as well as provide software-controlled end-effector deflection compensation during transport of heavier payloads.
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Equipment Front End Module (EFEM) Class 1 Minienvironment System
MiniMax™
Genmark’s MiniMax™ Equipment Front End Module (EFEM) is a class 1 minienvironment system designed to maximize productivity of semiconductor processing equipment tools that require the highest level of automation.The MiniMax™ can be customized to meet the automation requirements of any semiconductor manufacturing tool application and specified with one of the Genmark’s sophisticated and precise wafer and reticle handling robots, including the full line of patented GPR single or dual arm robots, GREX robot series, single and dual wafer aligners, FOUP/FOSB openers, reticle libraries, as well as any other customer specified equipment.
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High Throughput Wafer Sorter
SortMax300 HT™
Genmark’s SortMax300 HT™ is capable of achieving the highest wafer per hour throughput requirements while operating under strict reliability and cleanliness specifications. Based on modular design it can support configurations up to 8 FOUP/FOSB stations. Highest throughput capacity is a result of expanded technological features including uniquely designed dual end-effector wafer transfer mechanisms based on Genmark’s proven GREX dual arm robot series.
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Single- and Dual-Yaw Axis Wafer Transport Robot
GPR-GB7SY
The GPR-GB7SY Yaw-Axis (single and dual yaw) robot features Genmark’s technologically advanced mechanisms including patented GPR and YAW technologies to achieve the highest level of performance currently available in an automated material handler capable of transporting up to 450mm wafer payloads with utmost reliability and precision.
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Engineering Services
- Design and implementation of custom material handling solutions- Selection of optimal, tool specific, material handling systems- Optimization of tool automation performance- Reducing tool programming time via automated teaching- Development of customized tool diagnostic tools- Development of specialized automation system teaching wizards- Provide specialized training courses in material handling automation
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Compact Wafer Transport with Integral Wafer Pre-Aligner
GB4P
The GB4P Robot System with integral wafer pre-aligner is the most compact robot and pre-aligner package available on the market today for wafer handling applications up to 200mm, standard payload and throughput.Identical in size to Genmark’s original GB4 robot, the GB4P houses a built-in pre-aligner for wafers ranging from 2"- 8" in diameter. The adjustable feature on the pre-aligner allows for simple and fast configuration for different wafer sizes. Engineered for single or dual wafer transport, the GB4P robot is available with an extensive variety of reach and vertical stroke combinations.
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Servo-Controlled Wafer Transport Robot for Wet Conditions
GPR-GB7-W
GPR-GB7-W Robot System is designed with sealed mechanisms to prevent internal damage due to exposure to wet environments associated with automation of CMP and other process applications requiring materials handling under wet conditions.
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Wafer Handling System with Extended Vertical Travel, for 200mm, 300mm and 450mm Wafers
EVTMHS
The EVTMHS is a wafer handling system with extended vertical travel designed to transport 300mm and 450mm wafers in semiconductor manufacturing tools that require large work envelope solutions.The system can also handle 200mm wafers without any hardware changes. While for wafer sizes below 200mm, the robot End-Effector has to be reconfigured. The time that this reconfiguration takes is usually less than an hour including the time needed to teach all the pickup positions. Thus, the average teaching time of 45 minutes (for pickup locations) can be achieved thanks to the sophisticated autoteach routines provided by the system firmware.
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Stocker, Sorter and Metrology System
CODEX™
Genmark Automation’s CODEX™ Stocker is the industry’s first integrated stocker, sorter and metrology system that has the ability to store, track, and deliver, on demand, multiple substrate types along with their key attributes. Consolidating the functions of these traditionally nonrevenue-generating tools frees up fab floor space for production equipment, enabling a facility to maximize its productivity and yield.
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Automated Wafer Handler up to 450mm
GPR-GB7S
The GB7S Robot System employs Genmark’s breakthrough and patented GPR™ Technology to achieve the highest level of performance currently available in an automated wafer handler which is capable of handling up to 450mm diameter wafers. The patented GPR technology enables the servo-controlled robot to interface compliantly and intelligently with misaligned cassettes, FOUPS and process modules, as well as provide software-controlled end-effector deflection compensation during transport of heavier payloads. The unique and patented YAW technology feature of the GPR-GB7S Robot System enables it to access in-line process modules, FOUPS and cassettes from a fixed centralized location, and eliminates the need for radial placement of process and other stations around the robot. The GB7 Robot System can have various arm configurations to accommodate a wide range of SMIF/cassettes front-end layouts.
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Contract Equipment Manufacturing Solutions
With the current global manufacturing environment of increasing costs, using contract manufacturing as an alternative to operating and maintaining your own production facility is becoming an attractive solution for many companies. Genmark can help you focus on what you do best by offering numerous advantages. This can include lowering cost and capital, flexibility, inventory control, and much more. Allow our team of experts, with over two decades of experience, to help you explore the mutual benefits of a contract manufacturing solution for your business.
